Abstract: This paper introduces a batch fabrication method to manufacture micro-electromechanical system (MEMS) components for nuclear magnetic resonance (NMR) atomic sensors, such as NMR gyroscope ...
§ Graduate School of Science and Technology, Niigata University, 8050, Ikarashi, 2-no-cho, Nishi-ku, Niigata City, 950-2181, Japan Article Views are the COUNTER-compliant sum of full text article ...